Patent Assignment
Reel/Frame 050052/0577
Assignment of Assignor's Interest
Recorded: 2019-08-14
Pages: 3
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Atomic Layer Deposition of Protective Coatings for Semiconductor Process Chamber Components