Atomic layer deposition of protective coatings for semiconductor process chamber components
A multi-component coating composition for a surface of a semiconductor process chamber component comprising at least one first film layer of a yttrium oxide or a yttrium fluoride coated onto the surface of the semiconductor process chamber component using an atomic layer deposition process and at least one second film layer of an additional oxide or an additional fluoride coated onto the surface of the semiconductor process chamber component using an atomic layer deposition process, wherein the multi-component coating composition is selected from the group consisting of YO x F y , Y x Al y O, Y x Zr y O and Y x Zr y Al z O.
1. A method comprising:
depositing a first film layer of a yttrium oxide onto a surface of a chamber component for a processing chamber using a first number of repetitions of an atomic layer deposition process;
depositing a second film layer of zirconium oxide onto the surface using a second number of repetitions of the atomic layer deposition process;
depositing an additional film layer of aluminum oxide onto the surface using a third number of repetitions of the atomic layer deposition process; and
forming an interdiffused and homogenous Y x Zr y Al z O solid state phase coating composition on the surface
wherein x, y, and z have values that are based on the first number of repetitions of the atomic layer deposition process that are used to deposit the first film layer, the second number of repetitions of the atomic layer deposition process that are used to deposit the second film layer, and the third number of repetitions of the atomic layer deposition process that are used to deposit the additional film layer.
2. The method of claim 1 , wherein forming the interdiffused and homogenous Y x Zr y Al z O solid state coating composition comprises annealing the chamber component comprising the first film layer and the second film layer at a temperature ranging from about 500° C. to about 1800° C.
3. The method of claim 2 , wherein the annealing occurs at a temperature ranging from about 800° C. to about 900° C.
4. The method of claim 1 , wherein the interdiffused and homogenous Y x Zr y Al z O solid state coating composition comprises crystalline Y x Zr y Al z O.
5. The method of claim 1 , wherein the chamber component has a portion having a length to diameter (L:D) aspect ratio ranging from about 50:1 to about 100:1 and wherein the surface is an interior portion of the portion having the L:D aspect ratio ranging from about 50:1 to about 100.
6. The method of claim 1 , wherein a precursor used to deposit the second film layer comprises at least one of zirconium (IV) bromide, zirconium (IV) chloride, zirconium (IV) tert-butoxide, tetrakis(diethylamido)zirconium (IV), tetrakis(dimethylamido)zirconium (IV), or tetrakis(ethylmethylamido)zirconium (IV), and wherein a reactant used to deposit the second film layer comprises at least one of H 2 O, O 2 , or O 3 .
7. The method of claim 1 , wherein a precursor used to deposit the first film layer comprises at least one of tris(N,N-bis(trimethylsilyl)amide)yttrium (III), tris(cyclopentadienyl)yttrium(III), tris(butylcyclopentadienyl)yttrium(III), or tris(2,2,6,6-tetramethyl-3,5-heptanedionato)yttrium(III), and wherein a reactant used to deposit the first film layer comprises at least one of H 2 O, O 2 , or O 3 .
8. The method of claim 1 , wherein a precursor used to deposit the additional film layer comprises at least one of diethylaluminum ethoxide, tris(ethylmethylamido)aluminum, aluminum sec-butoxide, aluminum tribromide, aluminum trichloride, triethylaluminum, triisobutylaluminum, trimethylaluminum, or tris(diethylamido)aluminum, and wherein a reactant used to deposit the additional film layer comprises at least one of H 2 O, O 2 , or O 3 .
9. The method of claim 1 , further comprising:
alternately depositing one of a first plurality of additional film layers of yttrium oxide onto the surface of the chamber component, one of a second plurality of additional film layers of zirconium oxide onto the surface of the chamber component, and one of a third plurality of additional film layers of aluminum oxide onto the surface of the chamber component until a combined thickness of the first film layer, the second film layer, the additional film layer, the first plurality of additional film layers, the second plurality of additional film layers, and the third plurality of additional film layers reaches a target thickness.
10. The method of claim 1 , wherein the first film layer has a different thickness than the second film layer.
11. The method of claim 1 , wherein the first film layer has a first uniform thickness ranging from about two monolayers to about 1 micrometer.
12. The method of claim 11 , wherein the second film layer has the first uniform thickness.
13. The method of claim 11 , wherein the second film layer has a second uniform thickness that is different from the first uniform thickness.