Patent Assignment
Reel/Frame 050073/0854
Assignment of Assignor's Interest
Recorded: 2019-08-16
Pages: 5
Assignor
ISHIBASHI, TOMOATSU
Executed: 2019-07-16
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 1448510, JAPAN
Covered Property
(1)
Substrate Cleaning Tool, Substrate Cleaning Apparatus, Substrate Processing Apparatus, Substrate Processing Method, and Method of Manufacturing Substrate Cleaning Tool