Patent Assignment
Reel/Frame 050137/0266
Assignment of Assignor's Interest
Recorded: 2019-08-22
Pages: 4
Assignors
CHEN, YAN
Executed: 2019-08-15
TIAN, XINKANG
Executed: 2019-08-19
VUONG, VI
Executed: 2019-08-15
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Synthetic Wavelengths for Endpoint Detection in Plasma Etching