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Patent Assignment
Reel/Frame 050147/0547

Assignment of Assignor's Interest

Recorded: 2019-08-23 Pages: 3
Assignors
BAGGETT, JOHN
Executed: 2019-08-23
SHANER, DAVE
Executed: 2019-08-23
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property (1)
Substrate Support Having Customizable and Replaceable Features for Enhanced Backside Contamination Performance
Application: 16/549,239 →
Publication: US 2020/0066570
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Interest Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →