Patent Assignment
Reel/Frame 050205/0439
Assignment of Assignor's Interest
Recorded: 2019-08-28
Pages: 3
Assignor
WAKABAYASHI, SHINJI
Executed: 2019-08-09
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transfer Mechanism, Substrate Processing Apparatus, and Substrate Processing Method