Patent Assignment
Reel/Frame 050210/0065
Assignment of Assignor's Interest
Recorded: 2019-08-29
Pages: 2
Assignors
KATO, KOREHITO
Executed: 2019-08-02
IKETANI, YOSHIHIKO
Executed: 2019-08-02
SHIBUSAWA, YUKINOBU
Executed: 2019-08-02
SHIMIZU, HISASHI
Executed: 2019-08-02
Assignee
KANTO DENKA KOGYO CO., LTD.
2-105, KANDA-AWAJICHO, CHIYODA-KU, TOKYO, 1010063, JAPAN
Covered Property
(1)
Dry Etching Gas Composition and Dry Etching Method