Patent Assignment
Reel/Frame 050221/0369
Assignment of Assignor's Interest
Recorded: 2019-08-30
Pages: 3
Assignor
MATSUMOTO, KENJI
Executed: 2019-07-31
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Control Method