Patent Assignment
Reel/Frame 050223/0789
Assignment of Assignor's Interest
Recorded: 2019-08-30
Pages: 8
Assignors
TAKEBAYASHI, YUJI
Executed: 2019-08-08
TAKAGI, KOSUKE
Executed: 2019-08-19
HIRANO, ATSUSHI
Executed: 2019-08-08
NAKAGAWA, RYUICHI
Executed: 2019-08-08
ISOBE, NORIYUKI
Executed: 2019-08-08
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 1010045, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Non-Transitory Computer-Readable Recording Medium and Substrate Processing Apparatus