Patent Assignment
Reel/Frame 050270/0136
Assignment of Assignor's Interest
Recorded: 2019-09-05
Pages: 5
Assignors
KUWADA, HIROTAKA
Executed: 2019-08-23
NUNOSHIGE, YU
Executed: 2019-08-23
FUJII, YASUSHI
Executed: 2019-08-26
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film-Forming Apparatus and Film-Forming Method