Patent Assignment
Reel/Frame 050283/0022
Assignment of Assignor's Interest
Recorded: 2019-09-05
Pages: 6
Assignors
NOZAWA, SYUJI
Executed: 2019-08-19
IIZUKA, YOJI
Executed: 2019-08-19
YAMAGUCHI, TATSUYA
Executed: 2019-08-19
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus