Patent Assignment
Reel/Frame 050287/0833
Assignment of Assignor's Interest
Recorded: 2019-09-05
Pages: 5
Assignors
ZI, AN-REN
Executed: 2019-08-02
CHANG, CHING-YU
Executed: 2019-08-02
LIN, CHIN-HSIANG
Executed: 2019-08-14
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Photoresist, Developer, and Method of Forming Photoresist Pattern