Patent Assignment
Reel/Frame 050691/0749
Assignment of Assignor's Interest
Recorded: 2019-10-11
Pages: 5
Assignors
CHEN, YEN-TING
Executed: 2018-04-27
LEE, WEI-YANG
Executed: 2018-04-27
YANG, FENG-CHENG
Executed: 2018-04-27
CHEN, YEN-MING
Executed: 2018-04-27
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Using a Metal-Containing Layer as an Etching Stop Layer and to Pattern Source/Drain Regions of a FinFET