Patent Assignment
Reel/Frame 050735/0054
Assignment of Assignor's Interest
Recorded: 2019-10-16
Pages: 4
Assignors
KANEMATSU, YASUNORI
Executed: 2019-10-09
NAKAI, HITOSHI
Executed: 2019-10-03
OKUTANI, MANABU
Executed: 2019-10-03
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, and Substrate Processing Method