Patent Assignment
Reel/Frame 050878/0894
Assignment of Assignor's Interest
Recorded: 2019-10-31
Pages: 5
Assignors
CHEN, HSUEH-CHUNG
Executed: 2018-06-09
XU, YONGAN
Executed: 2018-06-06
CLEVENGER, LAWRENCE A.
Executed: 2018-06-06
MIGNOT, YANN
Executed: 2018-06-06
PEETHALA, CORNELIUS BROWN
Executed: 2018-06-06
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Multiple Patterning Scheme Integration with Planarized Cut Patterning