Patent Assignment
Reel/Frame 050938/0250
Assignment of Assignor's Interest
Recorded: 2019-11-06
Pages: 5
Assignors
LIU, CHEN-YU
Executed: 2019-10-01
CHANG, CHING-YU
Executed: 2019-10-01
LIN, CHIN-HSIANG
Executed: 2019-10-09
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Photoresist Composition and Method of Forming Photoresist Pattern