Patent Assignment
Reel/Frame 050957/0352
Assignment of Assignor's Interest
Recorded: 2019-11-08
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Low-k Feature Formation Processes and Structures Formed Thereby