Patent Assignment
Reel/Frame 050984/0852
Assignment of Assignor's Interest
Recorded: 2019-11-12
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Area Selective Deposition for Cap Layer Formation in Advanced Contacts