Patent Assignment
Reel/Frame 050997/0342
Assignment of Assignor's Interest
Recorded: 2019-11-13
Pages: 4
Assignors
CHANG, HSU-KAI
Executed: 2019-10-04
YANG, CHI-MING
Executed: 2019-10-25
LIU, JUI-HSIUNG
Executed: 2019-10-28
FU, JUI-HUNG
Executed: 2019-10-30
WU, HSIN-YI
Executed: 2019-10-02
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Organometallic Cluster Photoresists for Euv Lithography