Patent Assignment
Reel/Frame 051252/0287
Assignment of Assignor's Interest
Recorded: 2019-12-11
Pages: 3
Assignors
SOKOLOV, SERGEI
Executed: 2018-12-18
TARABRIN, SERGEY
Executed: 2018-12-18
CHENG, SU-TING
Executed: 2018-12-18
KOOLEN, ARMAND EUGENE ALBERT
Executed: 2018-12-18
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method of Measuring a Parameter of a Patterning Process, Metrology Apparatus, Target
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.