Patent Assignment
Reel/Frame 051252/0319
Assignment of Assignor's Interest
Recorded: 2019-12-11
Pages: 4
Assignors
SOKOLOV, SERGEI
Executed: 2019-03-13
TARABRIN, SERGEY
Executed: 2019-03-13
CHENG, SU-TING
Executed: 2019-03-13
KOOLEN, ARMAND EUGENE ALBERT
Executed: 2019-03-13
EURLINGS, MARKUS FRANCISCUS ANTONIUS
Executed: 2019-03-13
SCHREEL, KOENRAAD REMI ANDRÉ MARIA
Executed: 2019-03-13
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method of Measuring a Parameter of a Patterning Process, Metrology Apparatus, Target
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.