Patent Assignment
Reel/Frame 051466/0933
Assignment of Assignor's Interest
Recorded: 2020-01-09
Pages: 7
Assignors
CHENG, KANGGUO
Executed: 2018-06-05
XU, PENG
Executed: 2018-06-05
LEE, CHOONGHYUN
Executed: 2018-06-05
WU, HENG
Executed: 2018-06-05
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Formation of Air Gap Spacers for Reducing Parasitic Capacitance