Patent Assignment
Reel/Frame 051532/0861
Assignment of Assignor's Interest
Recorded: 2020-01-16
Pages: 4
Assignors
WANG, SHANYU
Executed: 2019-01-31
XIE, TING
Executed: 2019-01-29
YAN, CHUN
Executed: 2019-02-06
LU, XINLIANG
Executed: 2019-02-04
CHUNG, HUA
Executed: 2019-01-29
YANG, MICHAEL X.
Executed: 2019-01-29
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Ozone Treatment for Selective Silicon Nitride Etch Over Silicon
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jan 16, 2020
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 051532/0895 →
Security Interest
Oct 19, 2020
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 054100/0167 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →