Patent Assignment
Reel/Frame 051554/0650
Assignment of Assignor's Interest
Recorded: 2020-01-20
Pages: 7
Assignors
SHIMIZU, AKITAKA
Executed: 2019-12-26
UDA, SHUICHIRO
Executed: 2020-01-09
SAITO, TAKESHI
Executed: 2019-12-27
KATO, TAIKI
Executed: 2020-01-06
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method and Etching Device