Patent Assignment
Reel/Frame 051589/0530
Assignment of Assignor's Interest
Recorded: 2020-01-22
Pages: 3
Assignors
HSU, PEI-CHENG
Executed: 2020-01-15
LIEN, TA-CHENG
Executed: 2020-01-15
LEE, HSIN-CHANG
Executed: 2020-01-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD.6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Euv Masks to Prevent Carbon Contamination