Patent Assignment
Reel/Frame 051657/0903
Assignment of Assignor's Interest
Recorded: 2020-01-29
Pages: 2
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Electrostatic Chuck for Semiconductor Manufacturing Device
Patent:
1,012,051 →
Application:
29/715,863 →