IP Library › Granted Patent US 1,012,051
Granted Patent S1
US 1,012,051 · App. 29/715,863 · Granted Jan 23, 2024

Electrostatic chuck for semiconductor manufacturing device

Inventors: Masato Takayama (Miyagi, JP); Yasuharu Sasaki (Miyagi, JP)
Assignee: TOKYO ELECTRON LIMITED
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 1,012,051
App. No.
29/715,863
Granted
Jan 23, 2024
Kind
S1
Claims (1)

The ornamental design for an electrostatic chuck for semiconductor manufacturing device, as shown and described.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 29, 2020
From: TAKAYAMA, MASATO; SASAKI, YASUHARU
To: TOKYO ELECTRON LIMITED
Reel/Frame 051657/0903 →
Priority Claims (1)
JP 2019-013256 · Jun 17, 2019 · national