Patent Assignment
Reel/Frame 051784/0631
Assignment of Assignor's Interest
Recorded: 2020-02-11
Pages: 9
Assignors
MA, TRISTAN Y.
Executed: 2018-10-16
DAI, HUIXIONG
Executed: 2018-10-16
RENAU, ANTHONY
Executed: 2019-02-20
HAUTALA, JOHN
Executed: 2018-10-18
OLSON, JOSEPH
Executed: 2018-10-18
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Performance Improvement of Euv Photoresist by Ion Implantation