Patent Assignment
Reel/Frame 051802/0150
Assignment of Assignor's Interest
Recorded: 2020-02-12
Pages: 6
Assignors
VAN HAREN, RICHARD JOHANNES FRANCISCUS
Executed: 2017-09-22
VAN DIJK, LEON PAUL
Executed: 2017-09-25
MALAKHOVSKY, ILYA
Executed: 2017-09-20
OTTEN, RONALD HENRICUS JOHANNES
Executed: 2017-09-22
SADEGHINIA, MAHDI
Executed: 2017-09-20
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, AH VELDHOVEN, 5500, NETHERLANDS
Covered Property
(1)
Methods and Apparatus for Use in a Device Manufacturing Method