Patent Assignment
Reel/Frame 051813/0162
Assignment of Assignor's Interest
Recorded: 2020-02-13
Pages: 4
Assignors
AOKI, YUSUKE
Executed: 2020-01-24
TAKATA, FUMIYA
Executed: 2020-01-24
TOBANA, TOSHIKATSU
Executed: 2020-01-24
MORIKITA, SHINYA
Executed: 2020-01-24
FUJIWARA, KAZUNOBU
Executed: 2020-01-27
ABE, JUN
Executed: 2020-01-27
NAGAMI, KOICHI
Executed: 2020-01-21
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Apparatus and Method for Plasma Processing