Patent Assignment
Reel/Frame 051818/0656
Assignment of Assignor's Interest
Recorded: 2020-02-14
Pages: 3
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Drying Method and Substrate Drying Apparatus