Patent Assignment
Reel/Frame 051915/0619
Assignment of Assignor's Interest
Recorded: 2020-02-25
Pages: 4
Assignors
IINO, TADASHI
Executed: 2020-02-07
KAI, YOSHIHIRO
Executed: 2020-02-10
TOKUNAGA, YOICHI
Executed: 2020-02-07
OGATA, NOBUHIRO
Executed: 2020-02-10
HIGASHIJIMA, JIRO
Executed: 2020-02-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method