Patent Assignment
Reel/Frame 051938/0685
Assignment of Assignor's Interest
Recorded: 2020-02-26
Pages: 2
Assignors
TAKAGI, YUTA
Executed: 2020-01-29
HIROTA, KOSA
Executed: 2020-01-31
INOUE, YOSHIHARU
Executed: 2020-01-29
MIYAJI, MASAKAZU
Executed: 2020-01-29
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI-SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Processing Apparatus
Application:
16/642,187 →
Publication:
US 2020/0273683
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.