Patent Assignment
Reel/Frame 051977/0859
Assignment of Assignor's Interest
Recorded: 2020-03-02
Pages: 5
Assignors
CHIBA, RYO
Executed: 2020-02-18
SASAKI, YASUHARU
Executed: 2020-02-18
NAGAYAMA, AKIRA
Executed: 2020-02-18
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Stage and Substrate Processing Apparatus