Stage and substrate processing apparatus
The present invention provides a stage which comprises: a plate-shaped member having a mounting surface on which a workpiece to be processed is mounted and a rear surface facing the mounting surface, said plate-shaped member being provided with a through hole that penetrates through the mounting surface and the rear surface; and an embedded member disposed inside the through hole. This stage is configured such that the surface of the embedded member is provided with at least one of a concave portion and a convex portion.
1. A stage comprising:
a plate-shaped member having a mounting surface on which a workpiece is mounted, a rear surface facing the mounting surface, and a through hole penetrating through the mounting surface and the rear surface; and
an embedded member disposed inside the through hole,
wherein at least one of a concave portion and a convex portion is provided on a surface of the embedded member,
wherein the at least one of the concave portion and the convex portion on the surface of the embedded member includes a plurality of protrusions and a spiral protrusion, and
wherein the embedded member includes one of the plurality of protrusions and the spiral protrusion in a tip end portion of the embedded member, and includes the other of the plurality of protrusions and the spiral protrusion in a base end portion of the embedded member.
2. The stage of claim 1 , wherein an inner wall of the through hole and the embedded member are spaced apart from each other by a predetermined distance or less in a plan view.
3. The stage of claim 2 , wherein the plurality of protrusions are arranged at intervals of 1.2 mm or less in a circumferential direction.
4. The stage of claim 1 , wherein the plurality of protrusions are alternately formed in two or more layers.
5. The stage of claim 1 , wherein the plurality of protrusions are arranged at intervals of 1.2 mm or less in a circumferential direction.
6. The stage of claim 2 , wherein the predetermined distance is 0.05 mm or less.
7. The stage of claim 1 , wherein at least one of the concave portion and the convex portion on the surface of the embedded member is a concave portion or a convex portion having a width of 0.05 mm or less in a radial direction.
8. The stage of claim 1 , wherein the through hole is a heat transfer gas flow path or a hole through which a lifter pin configured to hold the workpiece is inserted.
9. A substrate processing apparatus comprising:
a processing container configured to process a workpiece therein; and
a stage disposed in the processing container and configured to mount the workpiece,
wherein the stage includes:
a plate-shaped member having a mounting surface on which the workpiece is mounted, a rear surface facing the mounting surface, and a through hole penetrating through the mounting surface and the rear surface; and
an embedded member disposed inside the through hole, and
at least one of a concave portion and a convex portion is provided on a surface of the embedded member,
wherein the at least one of the concave portion and the convex portion on the surface of the embedded member includes a plurality of protrusions and a spiral protrusion, and
wherein the embedded member includes one of the plurality of protrusions and the spiral protrusion in a tip end portion of the embedded member, and includes the other of the plurality of protrusions and the spiral protrusion in a base end portion of the embedded member.