Patent Assignment
Reel/Frame 051978/0509
Assignment of Assignor's Interest
Recorded: 2020-02-20
Pages: 2
Assignors
IKEDA, NORIHIKO
Executed: 2020-01-29
YASUI, NAOKI
Executed: 2020-01-29
YAMADA, KAZUYA
Executed: 2020-01-29
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI-SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Plasma Processing Apparatus, Plasma Processing Method, and Ecr Height Monitor
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.