Patent Assignment
Reel/Frame 051985/0556
Assignment of Assignor's Interest
Recorded: 2020-02-20
Pages: 2
Assignors
LIM, DOO HO
Executed: 2019-05-24
HA, CHANG-SEUNG
Executed: 2019-05-24
LEE, SEUNGBAE
Executed: 2019-05-24
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Support Unit, Apparatus and Method for Treating a Substrate