Patent Assignment
Reel/Frame 051986/0745
Assignment of Assignor's Interest
Recorded: 2020-03-03
Pages: 6
Assignors
SHERO, ERIC JAMES
Executed: 2020-02-07
MA, PAUL
Executed: 2020-02-07
SHARMA, BED PRASAD
Executed: 2020-01-27
SWAMINATHAN, SHANKAR
Executed: 2020-03-02
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method for Selective Deposition of Silicon Nitride Layer and Structure Including Selectively-Deposited Silicon Nitride Layer