Patent Assignment
Reel/Frame 052156/0369
Assignment of Assignor's Interest
Recorded: 2020-03-18
Pages: 5
Assignors
CHEN, HSIN-LIANG
Executed: 2020-02-21
WANG, WEN-CHIH
Executed: 2020-02-21
LIAO, CHIA-HUNG
Executed: 2020-02-21
CHEN, CHENG-CHIEH
Executed: 2020-02-21
YEH, YI-MING
Executed: 2020-02-21
LIN, HUNG-TING
Executed: 2020-02-21
LEE, YUNG-YAO
Executed: 2020-02-21
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
Apparatus for Physical Vapor Deposition and Method for Forming a Layer