Patent Assignment
Reel/Frame 052174/0037
Assignment of Assignor's Interest
Recorded: 2020-03-20
Pages: 9
Assignors
LI, YONGLIANG
Executed: 2020-03-18
CHENG, XIAOHONG
Executed: 2020-03-18
ZHANG, QINGZHU
Executed: 2020-03-18
YIN, HUAXIANG
Executed: 2020-03-18
WANG, WENWU
Executed: 2020-03-18
Assignee
INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
NO. 3 BEITUCHENG WEST ROAD, CHAOYANG DISTRICT, BEIJING, 100029, CHINA
Covered Property
(1)
Stacked Nanowire or Nanosheet Gate-All-Around Device and Method for Manufacturing the Same