Patent Assignment
Reel/Frame 052195/0674
Assignment of Assignor's Interest
Recorded: 2020-03-23
Pages: 9
Assignors
YU, LI-ZHEN
Executed: 2020-03-09
CHUANG, CHENG-CHI
Executed: 2020-03-06
WANG, CHIH-HAO
Executed: 2020-03-09
LIN, YU-MING
Executed: 2020-03-09
HUANG, LIN-YU
Executed: 2020-03-06
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Using a Liner Layer to Enlarge Process Window for a Contact Via