Patent Assignment
Reel/Frame 052203/0750
Assignment of Assignor's Interest
Recorded: 2020-03-20
Pages: 5
Assignor
MIYAZAKI, MITSURU
Executed: 2020-02-12
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 1448510, JAPAN
Covered Property
(1)
Substrate Support Apparatus and Substrate Cleaning Apparatus