Patent Assignment
Reel/Frame 052240/0307
Assignment of Assignor's Interest
Recorded: 2020-03-26
Pages: 20
Assignors
LAI, MING-CHE
Executed: 2020-03-26
PENG, HUA-WEI
Executed: 2020-03-26
CHENG, CHIA-HE
Executed: 2020-03-26
CHEN, MING-TSO
Executed: 2020-03-26
LU, CHAO-CHI
Executed: 2020-03-26
LIN, HSIN-HSU
Executed: 2020-03-26
LO, KUO-TSAI
Executed: 2020-03-26
WU, KAO-HUA
Executed: 2020-03-26
YEH, HUAN-HSIN
Executed: 2020-03-26
Assignee
UNITED MICROELECTRONICS CORP.
NO.3, LI-HSIN ROAD 2, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU CITY, TAIWAN
Covered Property
(1)
Substrate Processing Apparatus Equipped with Substrate Scanner