Patent Assignment
Reel/Frame 052295/0018
Assignment of Assignor's Interest
Recorded: 2020-04-02
Pages: 3
Assignor
TAPILY, KANDABARA
Executed: 2020-04-01
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Selectively Forming Metal Silicides for Semiconductor Devices