Patent Assignment
Reel/Frame 052317/0618
Assignment of Assignor's Interest
Recorded: 2020-04-06
Pages: 6
Assignors
SHIH, CHIH-TSUNG
Executed: 2020-01-31
LIU, BO-TSUN
Executed: 2020-01-31
WANG, CHIEN-MING
Executed: 2020-02-17
CHENG, YAHRU
Executed: 2020-02-04
LEE, TSUANG CHUAN
Executed: 2020-02-10
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Reducing Undesired Light Influence in Extreme Ultraviolet Exposure
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.