Patent Assignment
Reel/Frame 063120/0219
Corrective Assignment to Correct the Third Assignor's Name Previously Recorded at Reel: 052317 Frame: 0618. Assignor(S) Hereby Confirms the Assignment .
Recorded: 2023-03-20
Pages: 7
Assignors
SHIH, CHIH-TSUNG
Executed: 2020-01-31
LIU, BO-TSUN
Executed: 2020-01-31
WANG, CHEN-MING
Executed: 2020-02-17
CHENG, YAHRU
Executed: 2020-02-04
LEE, TSUNG CHUAN
Executed: 2020-02-10
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8 LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Reducing Undesired Light Influence in Extreme Ultraviolet Exposure
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.