Patent Assignment
Reel/Frame 052351/0735
Assignment of Assignor's Interest
Recorded: 2020-04-09
Pages: 5
Assignors
CHEN, FENG
Executed: 2020-04-06
HU, YUFEI
Executed: 2020-04-06
XU, WENJING
Executed: 2020-04-06
SHEN, GANG
Executed: 2020-04-07
WU, ZHIYUAN
Executed: 2020-04-07
HA, TAE HONG
Executed: 2020-04-07
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods for Forming Cobalt and Ruthenium Capping Layers for Interconnect Structures