Patent Assignment
Reel/Frame 052355/0775
Assignment of Assignor's Interest
Recorded: 2020-04-09
Pages: 10
Assignors
OGASAWARA, KOSUKE
Executed: 2020-03-13
IWASAKI, TAKAHISA
Executed: 2020-03-17
ISHII, KENTARO
Executed: 2020-04-09
IDE, SEIJI
Executed: 2020-04-08
HSIEH, CHIJU
Executed: 2020-03-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Etching Film and Plasma Processing Apparatus