Patent Assignment
Reel/Frame 052357/0299
Assignment of Assignor's Interest
Recorded: 2020-04-09
Pages: 5
Assignors
BIN BUDIMAN, MOHD FAIRUZ
Executed: 2020-04-07
MORIKITA, SHINYA
Executed: 2020-04-03
NAGAIWA, TOSHIFUMI
Executed: 2020-04-06
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Cleaning Method and Plasma Processing Apparatus