Patent Assignment
Reel/Frame 052368/0458
Assignment of Assignor's Interest
Recorded: 2020-04-10
Pages: 5
Assignors
SHIOKAWA, YOICHI
Executed: 2016-07-22
KOBATA, ITSUKI
Executed: 2016-07-22
YAGI, KEITA
Executed: 2016-07-22
WATANABE, KATSUHIDE
Executed: 2016-07-22
MARUYAMA, TORU
Executed: 2016-07-22
TAKAHASHI, NOBUYUKI
Executed: 2016-07-22
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing System, and Substrate Processing Method